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Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi. - Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011. - xxii, 205 p. : ill., port. - The Wiley microsystem and nanotechnology series . - Wiley microsystem and nanotechnology series. .

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2011.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.

ISBN:

LCCN:

Subjects--Topical Terms:
Microelectromechanical systems--Measurement.
Microelectronics--Measurement.
Holographic testing.
Image processing--Digital techniques.

Index Terms--Genre/Form:
Electronic books.

LC Class. No.: TK7875 / .D54 2011eb

Dewey Class. No.: 621.381