The MEMS handbook /
edited by Mohamed Gad-el-Hak.
- 2nd ed.
- Boca Raton, FL : Taylor & Francis, 2005.
- 3 v. : ill. ; 26 cm. in 27 cm. slipcase.
- Mechanical engineering series .
- Mechanical engineering series (Boca Raton, Fla.) .
[1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications.
0849321069 (set. hbk.) 0849391377 ([v]. 1. hbk.) 0849391385 ([v]. 2. hbk. ) 0849391393 ([v]. 3. hbk.)
Microelectromechanical systems--Handbooks, manuals, etc.
Microelectronics--Handbooks, manuals, etc.
Nanotechnology--Handbooks, manuals, etc.
621 / MEM
[1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications.
0849321069 (set. hbk.) 0849391377 ([v]. 1. hbk.) 0849391385 ([v]. 2. hbk. ) 0849391393 ([v]. 3. hbk.)
Microelectromechanical systems--Handbooks, manuals, etc.
Microelectronics--Handbooks, manuals, etc.
Nanotechnology--Handbooks, manuals, etc.
621 / MEM