Taylor's Library

Beam technologies for integrated processing (Record no. 70302)

000 -LEADER
fixed length control field 01795nam a2200373 a 4500
001 - CONTROL NUMBER
control field vtls003192137
003 - CONTROL NUMBER IDENTIFIER
control field MY-SjTCS
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200226110645.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m u
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cn|||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100712s1992 dcua sb 000 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
Canceled/invalid LC control number 92-060205
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 0309046351
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10055022
039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE]
-- 201007121631
-- VLOAD
040 ## - CATALOGING SOURCE
Original cataloging agency CaPaEBR
Transcribing agency CaPaEBR
050 14 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7836
Item number .N37 1992eb
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Edition number 20
110 2# - MAIN ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element National Research Council (U.S.).
Subordinate unit Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
245 10 - TITLE STATEMENT
Title Beam technologies for integrated processing
Medium [electronic resource] :
Remainder of title report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Washington, D.C. :
Name of publisher, distributor, etc. National Academy Press,
Date of publication, distribution, etc. 1992.
300 ## - PHYSICAL DESCRIPTION
Extent xii, 89 p. :
Other physical details ill ;
Dimensions 28 cm.
500 ## - GENERAL NOTE
General note "NMAB-461."
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references.
529 ## -
-- TSLHHL
533 ## - REPRODUCTION NOTE
Type of reproduction Electronic reproduction.
Place of reproduction Palo Alto, Calif. :
Agency responsible for reproduction ebrary,
Date of reproduction 2009.
Note about reproduction Available via World Wide Web.
-- Access may be limited to ebrary affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectronics industry.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Molecular beams
General subdivision Industrial applications.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microelectronics
General subdivision Materials.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Plasma-enhanced chemical vapor deposition
General subdivision Industrial applications.
655 #7 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
Source of term local
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ebrary, Inc.
9 (RLIN) 25628
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10055022
Public note An electronic book accessible through the World Wide Web; click to view
999 ## - SYSTEM CONTROL NUMBERS (KOHA)
Koha biblionumber 70302
Koha biblioitemnumber 70302
Holdings
Withdrawn status Lost status Damaged status Not for loan Date acquired Date last seen Price effective from
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