| 000 -LEADER |
|---|
| fixed length control field |
00929nam a2200241 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls003144002 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
MY-SjTCS |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200226110838.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
110218s2009 nju 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470471555 (Wiley-Interscience : hbk.) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0470471557 (Wiley- Interscience : hbk.) |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201212081105 |
| Level of effort used to assign nonsubject heading access points |
shuhada |
| Level of effort used to assign subject headings |
201212081101 |
| Level of effort used to assign classification |
shuhada |
| Level of effort used to assign subject headings |
201102181738 |
| Level of effort used to assign classification |
VLOAD |
| Level of effort used to assign subject headings |
200910291941 |
| Level of effort used to assign classification |
mas |
| -- |
200906161741 |
| -- |
shahriman |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815 |
| Item number |
EUV |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
EUV lithography / |
| Statement of responsibility, etc. |
Vivek Bakshi, editor. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Bellingham, Wash. : |
| Name of publisher, distributor, etc. |
SPIE Press ; |
| Place of publication, distribution, etc. |
Hoboken, NJ : |
| Name of publisher, distributor, etc. |
John Wiley, |
| Date of publication, distribution, etc. |
c2009. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxvii, 673 p. : |
| Other physical details |
ill. ; |
| Dimensions |
27 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Ultraviolet radiation |
| General subdivision |
Industrial applications. |
| 9 (RLIN) |
34815 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Photolithography. |
| 9 (RLIN) |
34816 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Optical coatings. |
| 9 (RLIN) |
34817 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Bakshi, Vivek. |
| 9 (RLIN) |
34818 |
| 920 ## - Programme |
|---|
| Programme |
ADTP : 132155 |
| 999 ## - SYSTEM CONTROL NUMBERS (KOHA) |
|---|
| Koha biblionumber |
72995 |
| Koha biblioitemnumber |
72995 |
