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Materials science of thin films [electronic resource] : deposition and structure / Milton Ohring.

Publisher: San Diego, CA : Academic Press, 2002Edition: 2nd ed.Description: xxi, 794 p. : ill. ; 24 cm.Subject(s): Thin filmsGenre/Form: Electronic books.DDC classification: 621.3815/2 Online resources: An electronic book accessible through the World Wide Web; click to view

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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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