Materials science in semiconductor processing [electronic resource].
Analytics: Show analyticsPublisher: Oxford, New York : Pergamon, c1998-ISSN: 1369-8001.Subject(s): Semiconductors -- Periodicals | Integrated circuits -- Materials -- PeriodicalsOnline resources: Abstracts Available: Feb 2002- Available on EBSCOhost. Indexing and abstracting for print publication. In: Academic Source CompleteContinues in part: Solid-state electronicsTitle from cover.
Academic Journal
TSLHHL
Indexing and abstracting for print publication.
Vol. 1, no. 1 and v. 1, no. 2 issued as separately numbered sections in v. 42, no. 5 and v. 42, no. 10 of: Solid-state electronics.