Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
By: National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.
Contributor(s): ebrary, Inc
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Publisher: Washington, DC : National Academy Press, 1997Description: xiv, 61 p. : ill.Subject(s): Microelectronics -- Materials | Microelectromechanical systems -- Design and constructionGenre/Form: Electronic books.DDC classification: 621.381 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| 621.381 (Browse shelf) | Available |
Includes bibliographical references (p. 51-55).
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Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.