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Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.

Publisher: Amsterdam ; Oxford : Elsevier, c2005Description: 1 online resources (xii, 312 p. : ill.).Subject(s): Microelectromechanical systems

Item type	Current location	Call number	Status	Date due	Barcode
		621.381 (Browse shelf)	Available

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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

Taylor's Library