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MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.

Contributor(s): Beeby, Stephen | ebrary, Inc.
Series: Microelectromechanical systems series: Publisher: Boston : Artech House, c2004Description: x, 269 p. : ill.Subject(s): Microelectromechanical systems | DetectorsGenre/Form: Electronic books.DDC classification: 681/.2 Online resources: An electronic book accessible through the World Wide Web; click to view