Ohring, Milton, 1936-

Materials science of thin films deposition and structure / [electronic resource] : Milton Ohring. - 2nd ed. - San Diego, CA : Academic Press, 2002. - xxi, 794 p. : ill. ; 24 cm.

Includes bibliographical references and index.


Electronic reproduction.
Palo Alto, Calif. :
ebrary,
2009.
Available via World Wide Web.
Access may be limited to ebrary affiliated libraries.






Thin films.


Electronic books.

TA418.9.T45 / O47 2002eb

621.3815/2