Materials science of thin films deposition and structure / [electronic resource] :
Milton Ohring.
- 2nd ed.
- San Diego, CA : Academic Press, 2002.
- xxi, 794 p. : ill. ; 24 cm.
Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.