TY  - BOOK
AU  - Ohring,Milton
ED  - ebrary, Inc.
TI  - Materials science of thin films: deposition and structure 
AV  - TA418.9.T45 O47 2002eb
U1  - 621.3815/2 22
PY  - 2002///
CY  - San Diego, CA
PB  - Academic Press
KW  - Thin films
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10172820
ER  -