Microelectronic engineering  [electronic resource]. 

 - Amsterdam :  Tokyo :  North-Holland ;  OHMSHA,  1983- 
 - Four or five vols. a year,  <2002- > 
 - Vol. 1, no. 1 (Sept. 1983)- 
<br/><br/> Title from cover.  Latest issue consulted: Vol. 61/62 (July 2002).  Academic Journal 
<br/><br/>Some nos./vols. issued in combined form. 
<br/><br/>
<br/><br/><label>ISSN: </label>0167-9317 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Periodicals.<br/>Semiconductor industry--Periodicals.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .M516