TY - SER TI - Microelectronic engineering SN - 0167-9317 AV - TK7871.85 .M516 PY - 1983///- CY - Amsterdam, Tokyo PB - North-Holland, OHMSHA KW - Semiconductors KW - Design and construction KW - Periodicals KW - Semiconductor industry N1 - Title from cover; Latest issue consulted: Vol. 61/62 (July 2002); Academic Journal; Some nos./vols. issued in combined form; Indexing and abstracting for print publication UR - http://ezproxy.taylors.edu.my/login?url=http://web.ebscohost.com/ehost/detail?sid=b741a605-369b-4308-a52c-e647ed40e68f%40sessionmgr11&vid=174&hid=108&bdata=JnNpdGU9ZWhvc3QtbGl2ZSZzY29wZT1zaXRl#db=a9h&jid=3OV ER -