TY  - SER
TI  - Materials science in semiconductor processing
SN  - 1369-8001
AV  - TK7871.85 M36782
PY  - 1998///-
CY  - Oxford, New York
PB  - Pergamon
KW  - Semiconductors
KW  - Periodicals
KW  - Integrated circuits
KW  - Materials
N1  - Title from cover; Academic Journal; Indexing and abstracting for print publication
UR  - http://ezproxy.taylors.edu.my/login?url=http://web.ebscohost.com/ehost/detail?sid=e89bfec1-2929-4dfd-b5ac-58a870fcd959%40sessionmgr12&vid=202&hid=17&bdata=JnNpdGU9ZWhvc3QtbGl2ZSZzY29wZT1zaXRl#db=a9h&jid=JN4
ER  -