@book{120936,
	author = {IEEE Components, Hybrids, and Manufacturing Technology Society.},
	title = {IEEE transactions on semiconductor manufacturing},
	publisher = {Institute of Electrical and Electronics Engineers},
	address = {New York, N.Y. :},
	note = {Description based on print version record.},
	url = {https://ezproxy.taylors.edu.my/login?url=https://search.ebscohost.com/direct.asp?db=a9h&jid=ISF}
}