IEEE transactions on semiconductor manufacturing  a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.  [electronic resource] 
 Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing  Transactions on semiconductor manufacturing  Semiconductor manufacturing 

 - New York, N.Y. :  Institute of Electrical and Electronics Engineers 
 - Quarterly 
 - Print began with v. 1, no. 1 (Feb. 1988). 
<br/><br/> Description based on print version record.  Latest issue consulted: Vol. 18, issue 3 (2005) (viewed IEEE website Sept. 21, 2005).  Academic Journal 
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<br/><br/><br/>Mode of access: World Wide Web. 
<br/><br/><label>ISSN: </label>1558-2345 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Periodicals.
<br/><br/><label>LC Class. No.: </label>ISSN RECORD TK7836  / .I39