TY - SER ED - IEEE Components, Hybrids, and Manufacturing Technology Society. ED - IEEE Electron Devices Society. ED - IEEE Reliability Society. ED - IEEE Solid-State Circuits Council. ED - Institute of Electrical and Electronics Engineers. TI - IEEE transactions on semiconductor manufacturing: a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council SN - 1558-2345 AV - ISSN RECORD CY - New York, N.Y. PB - Institute of Electrical and Electronics Engineers KW - Semiconductors KW - Design and construction KW - Periodicals N1 - Description based on print version record; Latest issue consulted: Vol. 18, issue 3 (2005) (viewed IEEE website Sept. 21, 2005); Academic Journal; Indexing and abstracting for print publication UR - https://ezproxy.taylors.edu.my/login?url=https://search.ebscohost.com/direct.asp?db=a9h&jid=ISF ER -