Microelectromechanical systems  advanced materials and fabrication methods /  [electronic resource] : 
Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. 
 - Washington, DC :  National Academy Press,  1997. 
 - xiv, 61 p. :  ill. 
<br/><br/>Includes bibliographical references (p. 51-55). 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
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<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials.<br/>Microelectromechanical systems--Design and construction.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .N333 1997eb 
<br/><br/><label>Dewey Class. No.: </label>621.381