TY  - BOOK
ED  - National Research Council (U.S.).
ED  - ebrary, Inc.
TI  - Microelectromechanical systems: advanced materials and fabrication methods 
AV  - TK7874 .N333 1997eb
U1  - 621.381 21
PY  - 1997///
CY  - Washington, DC
PB  - National Academy Press
KW  - Microelectronics
KW  - Materials
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references (p. 51-55); Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10055038
ER  -