TY  - BOOK
AU  - Lee,El-Hang
TI  - VLSI micro- and nanophotonics: science, technology, and applications 
SN  - 9781574447293 (hbk.)
U1  - 621.395 
PY  - 2011///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Technological innovations
KW  - Nanophotonics
KW  - Integrated circuits
KW  - Very large scale integration
N1  - Includes bibliographical references and index
ER  -