Liu, Chang, Ph.D.
Foundations of MEMS /
Chang Liu.
- 2nd ed.
- Upper Saddle River, N.J. : Prentice Hall, c2012.
- xiv, 562 p. : ill. ; 24 cm.
Includes bibliographical references and index.
9780132497367 (hbk.) 0132497360 (hbk.)
Microelectromechanical systems.
621.381 / LIU 2012