TY  - BOOK
AU  - Liu,Chang
TI  - Foundations of MEMS
SN  - 9780132497367 (hbk.)
U1  - 621.381 
PY  - 2012///
CY  - Upper Saddle River, N.J.
PB  - Prentice Hall
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
ER  -