Nakamura, Kenichiro (Chemical engineer),
Photopolymers : photoresist materials, processes, and applications /
Kenichiro Nakamura.
- 1 online resource (x, 188 pages) : illustrations.
- Optics and Photonics .
- Optics and photonics. .
Includes bibliographical references and index.
9781466517318 (electronic bk.) 146651731X (electronic bk.)
Microelectronics--Materials.
Photopolymerization.
Photopolymers--Industrial applications.
Photopolymers.
Photoresists.
Electronic books.
620.19204295