Nakamura, Kenichiro (Chemical engineer),

Photopolymers : photoresist materials, processes, and applications / Kenichiro Nakamura. - 1 online resource (x, 188 pages) : illustrations. - Optics and Photonics . - Optics and photonics. .

Includes bibliographical references and index.

9781466517318 (electronic bk.) 146651731X (electronic bk.)


Microelectronics--Materials.
Photopolymerization.
Photopolymers--Industrial applications.
Photopolymers.
Photoresists.


Electronic books.

620.19204295