The MEMS handbook /
edited by Mohamed Gad-el-Hak.
- 2nd ed.
- Boca Raton, FL : Taylor & Francis, 2005.
- 3 v. : ill. ; 26 cm. in 27 cm. slipcase.
- Mechanical engineering series .
- Mechanical engineering series (Boca Raton, Fla.) .
[1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications.