TY  - BOOK
AU  - Gad-el-Hak,Mohamed
TI  - The MEMS handbook
SN  - 0849321069 (set. hbk.)
U1  - 621 
PY  - 2005///
CY  - Boca Raton, FL
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Handbooks, manuals, etc
KW  - Microelectronics
KW  - Nanotechnology
N1  - [1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications
ER  -