TY  - BOOK
AU  - Tuomisto,Filip
TI  - Characterisation and control of defects in semiconductors
T2  - Materials, Circuits & Devices
SN  - 9781785616563
PY  - 2019///
CY  - Stevenage
PB  - IET
KW  - Ion implantation
KW  - Magnetic resonance
KW  - Semiconductor doping
KW  - Semiconductors
KW  - Materials
KW  - Silicon
KW  - Electronic books
UR  - https://ezproxy.taylors.edu.my/login?url=http://dx.doi.org/10.1049/PBCS045E
ER  -