Mack, Chris A. <br/><br/>
Fundamental principles of optical lithography  the science of microfabrication /  [electronic resource] : 
Chris Mack. 
 - Chichester, West Sussex, England ;  Hoboken, NJ, USA :  Wiley,  c2007. 
 - xvii, 515 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Nat. Bib. No.: </label>GBA791483  bnb 
<br/><br/><label>Nat. Bib. Agency Control No.: </label> Uk 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Design and construction.<br/>Microlithography--Industrial applications.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7874  / .M196 2007eb 
<br/><br/><label>Dewey Class. No.: </label>621.3815/31