EUV lithography / 
Vivek Bakshi, editor. 
 - Bellingham, Wash. :  Hoboken, NJ :  SPIE Press ;  John Wiley,  c2009. 
 - xxvii, 673 p. :  ill. ;  27 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470471555 (Wiley-Interscience : hbk.) 0470471557 (Wiley- Interscience : hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ultraviolet radiation--Industrial applications.<br/>Photolithography.<br/>Optical coatings.
<br/><br/><label>Dewey Class. No.: </label>621.3815  / EUV