TY  - BOOK
AU  - Bakshi,Vivek
TI  - EUV lithography
SN  - 9780470471555 (Wiley-Interscience : hbk.)
U1  - 621.3815 
PY  - 2009///
CY  - Bellingham, Wash., Hoboken, NJ
PB  - SPIE Press, John Wiley
KW  - Ultraviolet radiation
KW  - Industrial applications
KW  - Photolithography
KW  - Optical coatings
N1  - Includes bibliographical references and index
ER  -