Maluf, Nadim. <br/><br/>
An introduction to microelectromechanical systems engineering  [electronic resource] / 
Nadim Maluf, Kirt Williams. 
 - 2nd ed. 
 - Boston :  Artech House,  2004. 
 - xx, 282 p. :  ill. 
 - Artech House microelectromechanical systems (MEMS) series .
 - Microelectromechanical systems series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Electronic reproduction. <br/>Palo Alto, Calif. : <br/>ebrary, <br/>2009. <br/>Available via World Wide Web. <br/>Access may be limited to ebrary affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>LCCN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microtechnology.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M35 2004eb 
<br/><br/><label>Dewey Class. No.: </label>621.381