TY  - BOOK
AU  - Maluf,Nadim
AU  - Williams,Kirt
ED  - ebrary, Inc.
TI  - An introduction to microelectromechanical systems engineering
T2  - Artech House microelectromechanical systems (MEMS) series
AV  - TK7875 .M35 2004eb
U1  - 621.381 22
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Microtechnology
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10081925
ER  -