Plasma processing of materials [electronic resource] : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
By: National Research Council (U.S.). Panel on Plasma Processing of Materials
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Contributor(s): ebrary, Inc.
Publisher: Washington, D.C. : National Academy Press, 1991Description: xii, 75 p. : ill. ; 28 cm.Subject(s): Plasma engineering | Microelectronics -- Materials -- Effect of radiation on | Surfaces (Technology)Genre/Form: Electronic books. DDC classification: 621.044 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| 621.044 (Browse shelf) | Available |
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Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.