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Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.

By: Contributor(s): Publication details: Amsterdam ; Oxford : Elsevier, c2005.Description: 1 online resources (xii, 312 p. : ill.)Subject(s): DDC classification:
  • 621.381 22
Online resources:
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E-Book Taylor's Library-TU 621.381 (Browse shelf(Opens below)) e-book

Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.