Plasma processing and processing science [electronic resource] / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Contributor(s): Chen, Francis F | National Research Council (U.S.). Panel on Plasma Processing | National Research Council (U.S.). Naval Studies Board | National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications | ebrary, Inc
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Series: NRL strategic series: Publisher: Washington, D.C. : National Academy Press, 1995Description: x, 35 p.Subject(s): Plasma engineering | Semiconductors -- Etching | Plasma etchingGenre/Form: Electronic books.DDC classification: 621.044 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| 621.044 (Browse shelf) | Available |
Committee chair: Francis F. Chen.
This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.
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Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.