000 | 01384cas a22003255a 4500 | ||
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001 | vtls003134317 | ||
003 | MY-SjTCS | ||
005 | 20200207085350.0 | ||
006 | m d |||||| | ||
007 | cr anunnnuuuaa | ||
008 | 840123u1983uuuune qnzp 0 a0eng d | ||
022 | _a0167-9317 | ||
035 | _a(EbpS)ebs517986 | ||
039 | 9 |
_a201210311613 _bpushpa _y200812260844 _zVLOAD |
|
050 | 0 | 0 |
_aTK7871.85 _b.M516 |
245 | 0 | 0 |
_aMicroelectronic engineering _h[electronic resource]. |
260 |
_aAmsterdam : _bNorth-Holland ; _aTokyo : _bOHMSHA, _c1983- |
||
310 |
_aFour or five vols. a year, _b<2002- > |
||
362 | 0 | _aVol. 1, no. 1 (Sept. 1983)- | |
500 | _aTitle from cover. | ||
500 | _aLatest issue consulted: Vol. 61/62 (July 2002). | ||
500 | _aAcademic Journal | ||
515 | _aSome nos./vols. issued in combined form. | ||
529 | _aTSLHHL | ||
530 | _aIndexing and abstracting for print publication. | ||
650 | 0 |
_aSemiconductors _xDesign and construction _vPeriodicals. |
|
650 | 0 |
_aSemiconductor industry _vPeriodicals. |
|
773 | 0 |
_tAcademic Source Complete _dIpswich, MA : EBSCO Publishing, 1999- |
|
856 | 4 | 0 |
_uhttp://ezproxy.taylors.edu.my/login?url=http://web.ebscohost.com/ehost/detail?sid=b741a605-369b-4308-a52c-e647ed40e68f%40sessionmgr11&vid=174&hid=108&bdata=JnNpdGU9ZWhvc3QtbGl2ZSZzY29wZT1zaXRl#db=a9h&jid=3OV _zAccessible through the World Wide Web; click to view |
999 |
_c115974 _d115974 |