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_a621.381 _221 |
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_aNational Research Council (U.S.). _bCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems. |
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245 | 1 | 0 |
_aMicroelectromechanical systems _h[electronic resource] : _badvanced materials and fabrication methods / _cCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council. |
260 |
_aWashington, DC : _bNational Academy Press, _c1997. |
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300 |
_axiv, 61 p. : _bill. |
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504 | _aIncludes bibliographical references (p. 51-55). | ||
529 | _aTSLHHL | ||
533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
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650 | 0 |
_aMicroelectronics _xMaterials. |
|
650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
655 | 7 |
_aElectronic books. _2local |
|
710 | 2 |
_aebrary, Inc. _925628 |
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856 | 4 | 0 |
_uhttp://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10055038 _zAn electronic book accessible through the World Wide Web; click to view |
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_c127811 _d127811 |