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| 001 | vtls003235957 | ||
| 003 | MY-SjTCS | ||
| 005 | 20200306170739.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 120815s2005 ne a fsb 001 0 eng d | ||
| 020 | _z0444516166 (hbk.) | ||
| 020 | _z008045562X | ||
| 035 | _a(CaPaEBR)ebr10138376 | ||
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_a201208151747 _bwilmina _y201208151659 _zwilmina |
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_a621.381 _222 |
| 100 | 1 |
_aBao, Min-Hang. _9290608 |
|
| 245 | 1 | 0 |
_aAnalysis and design principles of MEMS devices _h[electronic resource] / _cby Minhang Bao. |
| 260 |
_aAmsterdam ; _aOxford : _bElsevier, _cc2005. |
||
| 300 | _a1 online resources (xii, 312 p. : ill.) | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aMicroelectromechanical systems. _9290609 |
|
| 650 | 0 |
_aMicrotechnology. _9290610 |
|
| 650 | 0 |
_aElectronic books. _9200311 |
|
| 710 | 2 |
_aebrary, Inc. _925628 |
|
| 856 | 4 | 0 |
_uhttp://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10138376 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c64956 _d64956 |
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