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008			100712s1992 dcua sb 000 0 eng
010			_z 92-060205
020			_z0309046351
035			_a(CaPaEBR)ebr10055022
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040			_aCaPaEBR _cCaPaEBR
050	1	4	_aTK7836 _b.N37 1992eb
082	0	4	_a621.381 _220
110	2		_aNational Research Council (U.S.). _bCommittee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
245	1	0	_aBeam technologies for integrated processing _h[electronic resource] : _breport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
260			_aWashington, D.C. : _bNational Academy Press, _c1992.
300			_axii, 89 p. : _bill ; _c28 cm.
500			_a"NMAB-461."
504			_aIncludes bibliographical references.
529			_aTSLHHL
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aMicroelectronics industry.
650		0	_aMolecular beams _xIndustrial applications.
650		0	_aMicroelectronics _xMaterials.
650		0	_aPlasma-enhanced chemical vapor deposition _xIndustrial applications.
655		7	_aElectronic books. _2local
710	2		_aebrary, Inc. _925628
856	4	0	_uhttp://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10055022 _zAn electronic book accessible through the World Wide Web; click to view
999			_c70302 _d70302