| 000 | 00929nam a2200241 a 4500 | ||
|---|---|---|---|
| 001 | vtls003144002 | ||
| 003 | MY-SjTCS | ||
| 005 | 20200226110838.0 | ||
| 008 | 110218s2009 nju 001 0 eng d | ||
| 020 | _a9780470471555 (Wiley-Interscience : hbk.) | ||
| 020 | _a0470471557 (Wiley- Interscience : hbk.) | ||
| 039 | 9 |
_a201212081105 _bshuhada _c201212081101 _dshuhada _c201102181738 _dVLOAD _c200910291941 _dmas _y200906161741 _zshahriman |
|
| 082 | 0 | 4 |
_a621.3815 _bEUV |
| 245 | 0 | 0 |
_aEUV lithography / _cVivek Bakshi, editor. |
| 260 |
_aBellingham, Wash. : _bSPIE Press ; _aHoboken, NJ : _bJohn Wiley, _cc2009. |
||
| 300 |
_axxvii, 673 p. : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aUltraviolet radiation _xIndustrial applications. _934815 |
|
| 650 | 0 |
_aPhotolithography. _934816 |
|
| 650 | 0 |
_aOptical coatings. _934817 |
|
| 700 | 1 |
_aBakshi, Vivek. _934818 |
|
| 920 | _aADTP : 132155 | ||
| 999 |
_c72995 _d72995 |
||