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010 _z 2004-052959
020 _z158053872X
020 _z1580538711
035 _a(CaPaEBR)ebr10081913
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040 _aCaPaEBR
_cCaPaEBR
050 1 4 _aTK7876
_b.S28 2004eb
082 0 4 _a621.381/3
_222
100 1 _aSantos, Hector J. de los.
245 1 0 _aIntroduction to microelectromechanical microwave systems
_h[electronic resource] /
_cHéctor J. de los Santos.
250 _a2nd ed.
260 _aBoston :
_bArtech House,
_cc2004.
300 _axiii, 221 p. :
_bill.
490 1 _aArtech House MEMS and sensors library
504 _aIncludes bibliographical references and index.
529 _aTSLHHL
533 _aElectronic reproduction.
_bPalo Alto, Calif. :
_cebrary,
_d2009.
_nAvailable via World Wide Web.
_nAccess may be limited to ebrary affiliated libraries.
650 0 _aMicrowave devices.
_926551
650 0 _aMicroelectromechanical systems.
655 7 _aElectronic books.
_2local
710 2 _aebrary, Inc.
_925628
830 0 _aMicroelectromechanical systems series.
856 4 0 _uhttp://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10081913
_zAn electronic book accessible through the World Wide Web; click to view
999 _c82393
_d82393