| 000 | 01533nam a2200397Ia 4500 | ||
|---|---|---|---|
| 001 | vtls003181553 | ||
| 003 | MY-SjTCS | ||
| 005 | 20200226111556.0 | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 100712s2004 maua sb 001 0 eng d | ||
| 010 | _z 2004-050669 | ||
| 020 | _z1580535917 | ||
| 020 | _z1580535909 (alk. paper) | ||
| 035 | _a(CaPaEBR)ebr10081925 | ||
| 039 | 9 |
_y201007121517 _zVLOAD |
|
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 050 | 1 | 4 |
_aTK7875 _b.M35 2004eb |
| 082 | 0 | 4 |
_a621.381 _222 |
| 100 | 1 | _aMaluf, Nadim. | |
| 245 | 1 | 3 |
_aAn introduction to microelectromechanical systems engineering _h[electronic resource] / _cNadim Maluf, Kirt Williams. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoston : _bArtech House, _c2004. |
||
| 300 |
_axx, 282 p. : _bill. |
||
| 490 | 1 | _aArtech House microelectromechanical systems (MEMS) series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 529 | _aTSLHHL | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2009. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aMicrotechnology. | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aWilliams, Kirt. | |
| 710 | 2 |
_aebrary, Inc. _925628 |
|
| 830 | 0 | _aMicroelectromechanical systems series. | |
| 856 | 4 | 0 |
_uhttp://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10081925 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c82941 _d82941 |
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