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EUV lithography / Vivek Bakshi, editor.

Contributor(s): Publication details: Bellingham, Wash. : SPIE Press ; Hoboken, NJ : John Wiley, c2009.Description: xxvii, 673 p. : ill. ; 27 cmISBN:
  • 9780470471555 (Wiley-Interscience : hbk.)
  • 0470471557 (Wiley- Interscience : hbk.)
Subject(s): DDC classification:
  • 621.3815 EUV
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Includes bibliographical references and index.