Taylor's Library

Fundamental principles of optical lithography (Record no. 64561)

000 -LEADER
fixed length control field 01602nam a2200397 a 4500
001 - CONTROL NUMBER
control field vtls003196335
003 - CONTROL NUMBER IDENTIFIER
control field MY-SjTCS
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200306170701.0
006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS
fixed length control field m u
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
fixed length control field cr cn|||||||||
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100712s2007 enka sb 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
Canceled/invalid LC control number 2007-044548
015 ## - NATIONAL BIBLIOGRAPHY NUMBER
National bibliography number GBA791483
Source bnb
016 7# - NATIONAL BIBLIOGRAPHIC AGENCY CONTROL NUMBER
Canceled/invalid control number 014276990
Source Uk
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 9780470018934
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 0470018933
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 9780470727300 (pbk.)
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
Canceled/invalid ISBN 0470727306 (pbk.)
035 ## - SYSTEM CONTROL NUMBER
System control number (CaPaEBR)ebr10300846
039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE]
-- 201007121705
-- VLOAD
040 ## - CATALOGING SOURCE
Original cataloging agency CaPaEBR
Transcribing agency CaPaEBR
050 14 - LIBRARY OF CONGRESS CALL NUMBER
Classification number TK7874
Item number .M196 2007eb
082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815/31
Edition number 22
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Mack, Chris A.
9 (RLIN) 289476
245 10 - TITLE STATEMENT
Title Fundamental principles of optical lithography
Medium [electronic resource] :
Remainder of title the science of microfabrication /
Statement of responsibility, etc. Chris Mack.
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. Chichester, West Sussex, England ;
-- Hoboken, NJ, USA :
Name of publisher, distributor, etc. Wiley,
Date of publication, distribution, etc. c2007.
300 ## - PHYSICAL DESCRIPTION
Extent xvii, 515 p. :
Other physical details ill. ;
Dimensions 25 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc. note Includes bibliographical references and index.
529 ## -
-- TSLHHL
533 ## - REPRODUCTION NOTE
Type of reproduction Electronic reproduction.
Place of reproduction Palo Alto, Calif. :
Agency responsible for reproduction ebrary,
Date of reproduction 2009.
Note about reproduction Available via World Wide Web.
-- Access may be limited to ebrary affiliated libraries.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits
General subdivision Design and construction.
9 (RLIN) 33037
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Microlithography
General subdivision Industrial applications.
9 (RLIN) 289477
655 #7 - INDEX TERM--GENRE/FORM
Genre/form data or focus term Electronic books.
Source of term local
9 (RLIN) 201578
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element ebrary, Inc.
9 (RLIN) 25628
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://ezproxy.taylors.edu.my/login?url=http://site.ebrary.com/lib/taylorscollege/Doc?id=10300846
Public note An electronic book accessible through the World Wide Web; click to view
999 ## - SYSTEM CONTROL NUMBERS (KOHA)
Koha biblionumber 64561
Koha biblioitemnumber 64561
Holdings
Withdrawn status Lost status Damaged status Not for loan Date acquired Date last seen Price effective from
        2020-02-07 2020-02-07 2020-02-07