Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
By: Mack, Chris A
.
Contributor(s): ebrary, Inc.
Publisher: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007Description: xvii, 515 p. : ill. ; 25 cm.Subject(s): Integrated circuits -- Design and construction | Microlithography -- Industrial applicationsGenre/Form: Electronic books. DDC classification: 621.3815/31 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| 621.3815/31 (Browse shelf) | Available |
Includes bibliographical references and index.
TSLHHL
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.