Beam technologies for integrated processing [electronic resource] : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
By: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems.
Contributor(s): ebrary, Inc
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Publisher: Washington, D.C. : National Academy Press, 1992Description: xii, 89 p. : ill ; 28 cm.Subject(s): Microelectronics industry | Molecular beams -- Industrial applications | Microelectronics -- Materials | Plasma-enhanced chemical vapor deposition -- Industrial applicationsGenre/Form: Electronic books.DDC classification: 621.381 Online resources: An electronic book accessible through the World Wide Web; click to view
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| 621.381 (Browse shelf) | Available |
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"NMAB-461."
Includes bibliographical references.
TSLHHL
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.