EUV lithography / Vivek Bakshi, editor.
Contributor(s): Bakshi, Vivek
.
Publisher: Bellingham, Wash. : Hoboken, NJ : SPIE Press ; John Wiley, c2009Description: xxvii, 673 p. : ill. ; 27 cm.ISBN: 9780470471555 (Wiley-Interscience : hbk.); 0470471557 (Wiley- Interscience : hbk.).Subject(s): Ultraviolet radiation -- Industrial applications | Photolithography | Optical coatingsDDC classification: 621.3815
| Item type | Current location | Call number | Copy number | Status | Notes | Date due | Barcode | Remark |
|---|---|---|---|---|---|---|---|---|
| Main Collection | TU External Storage-LCS | 621.3815 EUV (Browse shelf) | 1 | Available | SLASx,05000,03,GR | 5000002742 | Please fill up online form at https://taylorslibrary.taylors.edu.my/services/external_storage1 |
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| 621.3815 EDM Schaum's outline of theory and problems of electric circuits / | 621.3815 EDM Schaum's outline of theory and problems of electric circuits / | 621.3815 EDM Schaum's outline of theory and problems of electric circuits / | 621.3815 EUV EUV lithography / | 621.3815 FLO Electronic devices / | 621.3815 FLO Electronic devices / | 621.3815 FLO Electronic devices / |
Includes bibliographical references and index.