The MEMS handbook / edited by Mohamed Gad-el-Hak.
Contributor(s): Gad-el-Hak, Mohamed [(ed.)]
.
Series: Mechanical engineering series. Publisher: Boca Raton, FL : Taylor & Francis, 2005Edition: 2nd ed.Description: 3 v. : ill. ; 26 cm. in 27 cm. slipcase.ISBN: 0849321069 (set. hbk.); 0849391377 ([v]. 1. hbk.); 0849391385 ([v]. 2. hbk. ); 0849391393 ([v]. 3. hbk.).Subject(s): Microelectromechanical systems -- Handbooks, manuals, etc | Microelectronics -- Handbooks, manuals, etc | Nanotechnology -- Handbooks, manuals, etcDDC classification: 621
Contents:
[1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications.
| Item type | Current location | Call number | Vol info | Copy number | Status | Notes | Date due | Barcode | Remark |
|---|---|---|---|---|---|---|---|---|---|
| Main Collection | TU External Storage-LCS | 621 MEM (Browse shelf) | Vol. 3 | 1 | Available | SBSxx,36200,03,GR | 5000159235 | Please fill up online form at https://taylorslibrary.taylors.edu.my/services/external_storage1 |
[1] MEMS, introduction and fundamentals. - [2] MEMS, design and fabrication. - [3] MEMS, applications.