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Inertial MEMS : principles and practice / Volker Kempe.

by Kempe, Volker.

Publisher: Cambridge : Cambridge University Press, 2011Availability: Items available for loan: Taylor's Library-TU [Call number: 621.381 KEM 2011] (1).
Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao.

by Bao, Min-Hang | ebrary, Inc.

Publisher: Amsterdam ; Oxford : Elsevier, c2005Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.381] (1).
Introduction to microfluidics [electronic resource] / Patrick Tabeling ; translated by Suelin Chen.

by Tabeling, P | ebrary, Inc.

Publisher: Oxford, U.K. ; New York : Oxford University Press, 2005Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 629.8/042] (1).
Introduction to microelectromechanical microwave systems [electronic resource] / Héctor J. de los Santos.

by Santos, Hector J. de los | ebrary, Inc.

Edition: 2nd ed.Publisher: Boston : Artech House, c2004Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.381/3] (1).
MEMS mechanical sensors [electronic resource] / Stephen Beeby ... [et al.

by Beeby, Stephen | ebrary, Inc.

Publisher: Boston : Artech House, c2004Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 681/.2] (1).
An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.

by Maluf, Nadim | Williams, Kirt | ebrary, Inc.

Edition: 2nd ed.Publisher: Boston : Artech House, 2004Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.381] (1).
RF MEMS circuit design for wireless communications [electronic resource] / Héctor J. De Los Santos.

by Santos, Hector J. de los | ebrary, Inc.

Publisher: Boston : Artech House, c2002Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.382] (1).
Smart mems and sensor systems [electronic resource] / Elena Gaura & Robert Newman ; with contributions from Michael Kraft, Andrew Flewitt, Davies William de Lima Monteiro.

by Gaura, Elena | Newman, Robert M | ebrary, Inc.

Publisher: London : Imperial College Press, c2006Online access: An electronic book accessible through the World Wide Web; click to view Availability: No items available
Silicon carbide micro electromechanical systems for harsh environments [electronic resource] / editor Rebecca Cheung.

by Cheung, Rebecca | ebrary, Inc.

Publisher: London : Imperial College Press, c2006Other title: Silicon carbide microelectromechanical systems for harsh environments.Online access: An electronic book accessible through the World Wide Web; click to view Availability: No items available
Journal of microelectromechanical systems [electronic resource] : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.

by Institute of Electrical and Electronics Engineers | American Society of Mechanical Engineers.

Source: Academic Source CompletePublisher: New York, NY : Institute of Electrical and Electronics Engineers, c1992-Other title: Microelectromechanical systems.Online access: Abstracts Available: Jun 1996- Available on EBSCOhost. Availability: No items available
Microelectromechanical systems [electronic resource] : advanced materials and fabrication methods / Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

by National Research Council (U.S.). Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems | ebrary, Inc.

Publisher: Washington, DC : National Academy Press, 1997Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.381] (1).
VLSI micro- and nanophotonics : science, technology, and applications / edited by El-Hang Lee ... [et al.]

by Lee, El-Hang.

Publisher: Boca Raton, FL : CRC Press, c2011Availability: Items available for loan: Taylor's Library-TU [Call number: 621.395 VLS 2011] (1).
Foundations of MEMS / Chang Liu.

by Liu, Chang, Ph.D.

Edition: 2nd ed.Publisher: Upper Saddle River, N.J. : Prentice Hall, c2012Availability: Items available for loan: Taylor's Library-TU [Call number: 621.381 LIU 2012] (2).
Introduction to microfabrication / Sami Franssila.

by Franssila, Sami.

Edition: 2nd ed.Publisher: Chichester, West Sussex : Wiley, 2010Availability: Items available for loan: Taylor's Library-TU [Call number: 621.381 FRA 2010] (1).
Advanced RF MEMS / Stepan Lucyszyn.

by Lucyszyn, S. (Stepan).

Publisher: Cambridge : Cambridge University Press, 2010Availability: Items available for loan: Taylor's Library-TU [Call number: 621.381 LUC 2010] (1).
Microelectronic systems : circuits, systems and applications / Albert Heuberger, Günter Elst, Randolf Hanke, editors.

by Heuberger, Albert | Elst, Gunter | Hanke, Randolf.

Publisher: Heidelberg : Springer, c2011Availability: Items available for loan: Taylor's Library-TU [Call number: 621.381 MIC 2011] (1).
Digital holography for MEMS and microsystem metrology [electronic resource] / edited by Anand Asundi.

by Asundi, Anand | ebrary, Inc.

Publisher: Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011Online access: An electronic book accessible through the World Wide Web; click to view Availability: Items available for loan: [Call number: 621.381] (1).
Trends in nano- and micro-cavities [electronic resource] / edited by O'Dae Kwon, Byoungho Lee, Kyungwon An.

by Kwon, O'Dae | Lee, Byoungho | An, Kyungwon | ebrary, Inc.

Publisher: Hilversum, The Netherlands : Bentham Science Publishers, 2011Online access: An electronic book accessible through the World Wide Web; click to view Availability: No items available
The MEMS handbook / edited by Mohamed Gad-el-Hak.

by Gad-el-Hak, Mohamed, 1945- [(ed.)].

Edition: 2nd ed.Publisher: Boca Raton, FL : Taylor & Francis, 2005Availability: Items available for loan: Taylor's Library-TU [Call number: 621 MEM] (1).