Fundamental principles of optical lithography [electronic resource] : the science of microfabrication / Chris Mack.
By: Mack, Chris A
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Contributor(s): ebrary, Inc
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Publisher: Chichester, West Sussex, England ; Hoboken, NJ, USA : Wiley, c2007Description: xvii, 515 p. : ill. ; 25 cm.Subject(s): Integrated circuits -- Design and construction![](/opac-tmpl/bootstrap/images/filefind.png)
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Item type | Current location | Call number | Status | Date due | Barcode |
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621.3815/31 (Browse shelf) | Available |
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Includes bibliographical references and index.
TSLHHL
Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.